Overview of Equipment
AIP®-iX Series
The arc evaporation source unit and etching system were improved. A new flagship model in one package equipped with a renovated new control system.
Coating System for the New generation that contribute to our customers’ innovations.
Equipment Features
Increased aluminum content ratio and improvement of surface roughness of AlCrN coating
Among the metallic elements in the cubic structured AlCrN coating, the limit of aluminum content was generally considered to be about up to 65 at%. This innovated new evaporation source μ-ARC enabled an aluminum content more than 70 at%.
Improved etching performance in deep trench.
The new etching system, Me-FAPE, improves the coating adhesion in deep trench areas, and also improves the uniformity of etching performance in the coating zone.The combination of μ-ARC and Me-FAPE greatly improves life span over conventional high-end cutting tools.
Equipped a system status -monitoring system collecting a dramatically larger range of operational data than before. These data support smoother identification of the cause when trouble occurs. In addition, the system accumulates data every batch, visualizes the status of the equipment, and makes predictive maintenance easier.
Basic Equipment Specifications
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| Total equipment footprint | Equipment body: 5 m (W) x 2 m (D) Recommended installation space: 7 m (W) x 4.6 m (D) |
| Equipment Layout | One package |
| International standard | UL/CE Options |
| Input Voltage | 200-220V / 50-60 Hz |
| Table diameter | 650 mm |
| Processing height | 350 mm |
| Number of standard axes | Φ130 mm x 10 axes, others |
| Table load capacity | Up to 500 kg |
| Number of evaporation sources/area (total) | Maximum 3 levels x 4 sides |
| Evaporation source | New evaporation source μ-ARC (conventional evaporation source can be selected as an option) |
| Etching source | New method Me-FAPE |
| Control system | System status monitor function Fast data logging (optional) Large Monitor |
