Overview of Equipment
The Hybrid Series is equipped with two main evaporation sources from Kobelco.
It is mainly used as R&D equipment and expands the possibilities of R&D and production of high-performance film in various industrial fields.
It is equipped with two evaporation sources (AIP® and UBMS®) and allows complex, high-end coating through alternating or simultaneous discharge.Details of evaporation sources
Specifications can be customized to meet international safety standards. We can also tailor the specifications to meet your needs for safety standards developed in-house.
Basic Equipment Specifications
|Minimum space for installation||6 m × 6 m|
|Effective coating area||ø450 mm × H 500 mm|
|Number of evaporation sources||R&D: 3 sources × 2 surfaces
UBMS®: 1 source × 2 surfaces
|Substrate table||ø130 × 6 axes, Rotation/revolution|
|Max loading weight of substrates||Max. 180 kg|
|Typical application||Medium-scale production
Tools, automobile parts,dies and molds (medium-scale)